Design, Fabrication, and Characterization of a Piezoelectric Micromachined Ultrasonic Transducer with a Suspended Cantilever Beam-like Structure with Enhanced SPL for Air Detection Applications.

Abstract

Air-coupled ultrasonic detection demands high transmission performance from piezoelectric micromachined ultrasonic transducers (PMUTs). However, existing microelectromechanical system (MEMS)-based PMUTs deliver limited output, which compromises measurement accuracy and constrains further development. This work proposes a novel PMUT design with a cantilevered, boundary-suspended diaphragm that relieves residual stress, relaxes edge constraints, increases the mechanical degrees of freedom, and enables larger vibration amplitudes. Additionally, this work develops an accurate air-coupling model to predict device performance and a streamlined micro-nanofabrication process for device realization. Experimental results show that under a 1 Vpp (-5 Voffset) drive, the device achieves a peak acoustic pressure of 4.004 Pa at 69.3 kHz, measured at 10 cm distance in air, corresponding to a maximum sound pressure level of 106.02 dB (re 2 × 10^-5 Pa). Compared to a traditional PMUT at 98.45 dB, this represents a 7.57 dB improvement and, to our knowledge, the highest reported sound pressure level at 10 cm for a single PMUT operating near 70 kHz under a 1 Vpp excitation. These results validate the significant enhancement in transmission performance achieved by the proposed topological structure, offering a solution to overcome the common bottleneck of insufficient output in PMUTs, and indicate strong potential for broader air-coupled sensing applications.